Vacuum Microelectronics Program Staff

Professional Staff

Charles A. (Capp) Spindt, Program Director
Thin-film microfabrication technology, especially topologically structured films; development of distributed dynode electron multipliers; design, development, fabrication, and application of field-emission cathode arrays for vacuum microelectronics; design, development, fabrication, and application of microfield ionizers for mass spectrometry.

Ivor Brodie, Senior Scientific Advisor
Research management in applied physics; electron emission and applications; vacuum tubes, vacuum physics, mass spectroscopy, and electrical breakdown in vacuum; sputtering and other vacuum coating techniques; electrographic printing, electrophotography, and electroradiography; electron-beam lithography; plasma chemistry; imaging science and displays

Bill Chu, Research Engineer

Chris Holland , Senior Research Physicist
Vacuum microelectronics development, fabrication and testing; microfabrication technology; thin-film deposition; chemical vapor deposition; dry and wet etching; silicon wafer processing; anisotropic etching and fabrication of silicon structures; electron optics; photo and electron beam lithography; SEM and X-ray surface analysis; vacuum techniques

Paul Schwoebel , Research Engineer
Surface science, surface analysis, field ion and electron microscopy, high-voltage engineering, cryogenic engineering, ultra-high-vacuum and vacuum-tube techniques

Technical Staff