Recycling Fluorine During Semiconductor Manufacturing Perflourocarbons (PFC) are widely used to clean the CVD chambers used for depositing SiO, SiN, or other dielectrics. In the plasma, the PFC is converted into flourine atoms that are the active cleaning agents. Recycling fluorine is necessary to meet the environmental concerns and to minimize production costs

Advantage
SRI has developed a proprietary scheme that should allow on-site conversion of the HF gas in the exhaust of tools into a form that is active and can be injected back into the process stream.

Opportunity
We are looking for partners to develop this scheme into a module that can be attached to the tools and achieve on-site closed-loop recycling.

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Technical Contact:
Ripudaman Malhotra
(650) 859-2805
ripudaman.malhotra@sri.com